ASTM F1374-1992(2005) 气体分配系统组件内表面IC/GC/FTIR的离子/有机可萃取物的标准试验方法
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【英文标准名称】:StandardTestMethodforIonic/OrganicExtractablesofInternalSurfaces-IC/GC/FTIRforGasDistributionSystemComponents
【原文标准名称】:气体分配系统组件内表面IC/GC/FTIR的离子/有机可萃取物的标准试验方法
【标准号】:ASTMF1374-1992(2005)
【标准状态】:现行
【国别】:
【发布日期】:1992
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:精整;燃气管路;试验
【英文主题词】:Chromatography-gas;Chromatography-ion;Extractablemattercontent;Fourier-transforminfrared(FTIR)analysis;Gasdistributionsystems;Ionic/organicextractables;Semiconductorcleanrooms;Stainlesssteel-gasdistributionsystems;Surfaceanal
【摘要】:Thepurposeofthistestmethodistodefineaprocedurefortestingelectropolishedstainlesssteelcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforthepurposesofqualificationforthisinstallation.FIG.1Ionic/OrganicContributionDataTableIllustrationFIG.2Ionic/OrganicContributionDataTableIllustration1.1Thistestmethodestablishesaprocedurefortestingcomponentsusedinultra-high-puritygasdistributionsystemsforionicandorganicsurfaceresidues.1.2Thistestmethodappliestoin-linecomponentscontainingelectronicsgradematerialsinthegaseousform.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofthedetectioninstrumentsandbytheavailablelevelsofpurityinextractingsolvents.Whiletheionandgaschromatographicmethodsarequantitative,theFouriertransforminfraredspectroscopy(FTIR)methodcanbeusedaseitheraqualitativeoraquantitativetool.Inaddition,thegaschromatography(GC)andFTIRmethodsareusedtodetecthydrocarbonsandhalogenatedsubstancesthatremainasresiduesoncomponentinternalsurfaces.Thiseliminatesthosematerialswithhighvaporpressures,whichareanalyzedperthetotalhydrocarbonstest,fromthistestmethod.1.3.2Thistestmethodisintendedforusebyoperatorswhounderstandtheuseoftheapparatusatalevelequivalenttotwelvemonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandards.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.
【中国标准分类号】:J15
【国际标准分类号】:17_040_20
【页数】:5P.;A4
【正文语种】:
【原文标准名称】:气体分配系统组件内表面IC/GC/FTIR的离子/有机可萃取物的标准试验方法
【标准号】:ASTMF1374-1992(2005)
【标准状态】:现行
【国别】:
【发布日期】:1992
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:精整;燃气管路;试验
【英文主题词】:Chromatography-gas;Chromatography-ion;Extractablemattercontent;Fourier-transforminfrared(FTIR)analysis;Gasdistributionsystems;Ionic/organicextractables;Semiconductorcleanrooms;Stainlesssteel-gasdistributionsystems;Surfaceanal
【摘要】:Thepurposeofthistestmethodistodefineaprocedurefortestingelectropolishedstainlesssteelcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforthepurposesofqualificationforthisinstallation.FIG.1Ionic/OrganicContributionDataTableIllustrationFIG.2Ionic/OrganicContributionDataTableIllustration1.1Thistestmethodestablishesaprocedurefortestingcomponentsusedinultra-high-puritygasdistributionsystemsforionicandorganicsurfaceresidues.1.2Thistestmethodappliestoin-linecomponentscontainingelectronicsgradematerialsinthegaseousform.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofthedetectioninstrumentsandbytheavailablelevelsofpurityinextractingsolvents.Whiletheionandgaschromatographicmethodsarequantitative,theFouriertransforminfraredspectroscopy(FTIR)methodcanbeusedaseitheraqualitativeoraquantitativetool.Inaddition,thegaschromatography(GC)andFTIRmethodsareusedtodetecthydrocarbonsandhalogenatedsubstancesthatremainasresiduesoncomponentinternalsurfaces.Thiseliminatesthosematerialswithhighvaporpressures,whichareanalyzedperthetotalhydrocarbonstest,fromthistestmethod.1.3.2Thistestmethodisintendedforusebyoperatorswhounderstandtheuseoftheapparatusatalevelequivalenttotwelvemonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandards.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.
【中国标准分类号】:J15
【国际标准分类号】:17_040_20
【页数】:5P.;A4
【正文语种】:
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